Feed-forward pressure control of balancing cylinder for hybrid electric-pneumatic ultra-precision vertical positioning device
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN FLUID POWER SYSTEM SOCIETY
سال: 2019
ISSN: 1349-7022,1880-3121
DOI: 10.5739/jfps.50.18